Multiflo® Compounds

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DN1027

Typical material Properties

Part Name DN1027
Hardness (Shore A) 72
Tensile Strength (MPa) 15
Elongation (%) 190
Color Dark Brown
Service Temperature (°C) 300
Compression Set (%)
200°C *70h		 19

Key Attributes

  • Not using any filler to minimize particle contamination.
  • Superior plasma resistance
  • Low Particle generation in plasma
  • Excellent chemical resistance
  • Excellent thermal stability

Application

  • Gas inlet seals
  • Window seals
  • Valve seals
  • Chamber lid seals

Suggestion

  • Chemical Vapor Deposition
  • Plasma Enhanced CVD (PECVD)
  • Etching, Ashing
  • Rapid Thermal Processing