Multiflo® Compounds

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J501W

Typical material Properties

Part Name J501W
Hardness (Shore A) 72
Tensile Strength (MPa) 15.6
Elongation (%) 180
Color WHITE
Service Temperature (°C) 250
Compression Set (%)
200°C *70h
22

Key Attributes

  • Superior plasma resistance
  • Excellent chemical resistance

Application

Suggestion

  • Oxidation (LPCVD)
  • Dry plasma etch
  • Dry ashing