Multiflo® Compounds

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J520B

Typical material Properties

Part Name J520B
Hardness (Shore A) 75
Tensile Strength (MPa) 12.8
Elongation (%) 160
Color BLACK
Service Temperature (°C) 320
Compression Set (%)
200°C *70h		 10

Key Attributes

  • Well-adaptable for high temperature process
  • Superior plasma resistance
  • Excellent chemical resistance
  • Low compression set

Application

  • Quartz rod seals
  • Gas inlet seals
  • Valve seals
  • Chamber lid seals

Suggestion

  • Oxidation (LPCVD)
  • Diffusion
  • Rapid Thermal Processing (RTP)
  • Dry plasma etch
  • Dry ashing