Multiflo® Compounds

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J808B

Typical material Properties

Part Name J808B
Hardness (Shore A) 70
Tensile Strength (MPa) 16
Elongation (%) 180
Color BLACK
Service Temperature (°C) 230
Compression Set (%)
200°C *70h
24

Key Attributes

  • Excellent chemical resistancee
  • Superior plasma resistance

Application

  • Gas inlet seals
  • Valve seals
  • Chamber lid seals

Suggestion

  • Oxidation (LPCVD)
  • Wet etch
  • Dry plasma etch
  • Dry ashing